Daan C Schram 2009 Plasma Sources Sci. Technol. 18 014003 doi:10.1088/0963-0252/18/1/014003
Daan C Schram
Show affiliationsDuring the last century plasmas have been investigated from various perspectives: light production, astrophysics and starlight, thermonuclear fusion and plasma chemistry and processing. Attention has shifted from atomic excitation to molecular conversion and deposition. This paper addresses the essential role of electrons and ions in forming the plasma, of radicals, of charge and of modified surface kinetics. It is made clear that plasma is a non-equilibrium state of matter, which can be best characterized by the electron density. It is concluded that this non-equilibrium transient character of plasma forms its basic nature. The created electrons, radicals and charge lead to a new situation, distinct from high temperature chemistry with different surface conditions. This enables plasmas to be used for new applications with fast time modulation of plasma processes.
82.33.Xj Plasma reactions (including flowing afterglow and electric discharges)
82.65.+r Surface and interface chemistry; heterogeneous catalysis at surfaces
Surfaces, interfaces and thin films
Issue 1 (February 2009)
Received 14 August 2008, in final form 15 September 2008
Published 14 November 2008
Daan C Schram 2009 Plasma Sources Sci. Technol. 18 014003
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