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Control of nitrogen species in helicon plasmas

R F Boivin1 and E E Scime2

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There are several possible reactions for both growth and decomposition of GaN layers in stable plasma conditions. A greater understanding of the plasma processes involved in the creation of the different N2 species is required before many growth related problems can be resolved. A plasma source capable of selecting different active nitrogen species could be used to study the different reactions related to the growth process. In this paper, we present a spectroscopic study of a helicon plasma source. Five different nitrogen species in the plasma are monitored, namely: N II (atomic ion), N I (atomic neutral), {\rm N}_{2}^{+} (molecular ion) and two different excited states of the N2 molecule as a function of the filling pressure. We show that by simply changing one plasma parameter (operating pressure), the plasma undergoes a transformation from an essentially atomic nature at low pressure to a dominantly molecular nature at higher pressure. The line intensity variations as a function of electron temperature are consistent with expectations based on the published formation rates for each species.


PACS

52.50.Dg Plasma sources

52.70.-m Plasma diagnostic techniques and instrumentation

82.33.Xj Plasma reactions (including flowing afterglow and electric discharges)

Subjects

Instrumentation and measurement

Plasma physics

Chemical physics and physical chemistry

Dates

Issue 2 (May 2005)

Received 12 September 2004

Published 8 March 2005



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