R F Boivin and E E Scime 2005 Plasma Sources Sci. Technol. 14 283 doi:10.1088/0963-0252/14/2/009
R F Boivin1 and E E Scime2
Show affiliationsThere are several possible reactions for both growth and decomposition of GaN layers in stable plasma conditions. A greater understanding of the plasma processes involved in the creation of the different N2 species is required before many growth related problems can be resolved. A plasma source capable of selecting different active nitrogen species could be used to study the different reactions related to the growth process. In this paper, we present a spectroscopic study of a helicon plasma source. Five different nitrogen species in the plasma are monitored, namely: N II (atomic ion), N I (atomic neutral),
(molecular ion) and two different excited states of the N2 molecule as a function of the filling pressure. We show that by simply changing one plasma parameter (operating pressure), the plasma undergoes a transformation from an essentially atomic nature at low pressure to a dominantly molecular nature at higher pressure. The line intensity variations as a function of electron temperature are consistent with expectations based on the published formation rates for each species.
52.70.-m Plasma diagnostic techniques and instrumentation
82.33.Xj Plasma reactions (including flowing afterglow and electric discharges)
Issue 2 (May 2005)
Received 12 September 2004
Published 8 March 2005
R F Boivin and E E Scime 2005 Plasma Sources Sci. Technol. 14 283
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