J J Blandino and D G Goodwin 2004 Plasma Sources Sci. Technol. 13 712 doi:10.1088/0963-0252/13/4/022
J J Blandino1 and D G Goodwin2
Show affiliationsThe use of a magnetoplasmadynamic (MPD) accelerator for diamond synthesis is investigated. The acceleration process in an MPD device is reviewed and results presented for a test in which a low power (15 kW) MPD accelerator was used as the gas activation source for diamond deposition. A hydrogen–argon mixture was used in the discharge with externally injected methane as the carbon precursor. Results, including SEM images, Raman and x-ray diffraction spectra are presented for a 3.3 µm thick film deposited over a 100 min period. The Raman spectra include a broad background and shift in the diamond peak, indicative of contamination and stresses in the deposited film. Potential scaling benefits of the MPD accelerator as well as some of the drawbacks associated with methane injection and sample contamination underscored by the experiments are identified and discussed.
52.59.Dk Magneto-plasma accelerated plasmas
52.77.Dq Plasma-based ion implantation and deposition
52.25.Os Emission, absorption, and scattering of electromagnetic radiation
Issue 4 (November 2004)
Received 7 January 2004
Published 4 November 2004
J J Blandino and D G Goodwin 2004 Plasma Sources Sci. Technol. 13 712
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