A Shabalin 2004 Plasma Sources Sci. Technol. 13 588 doi:10.1088/0963-0252/13/4/006
A Shabalin
Show affiliationsSteady-state operation of a toroidal, inductively coupled discharge at pressures up to 640 Torr is described. Measurements of the plasma loop voltage and broadband light emission are reported for different pressures up to one atmosphere, flows up to 14 slm and power levels up to 8 kW. While most of the experiments relate to pure argon plasmas, measurements in mixed argon plasmas with up to 10% of reactive gases such as oxygen and nitrogen are also reported.
52.50.Qt Plasma heating by radio-frequency fields; ICR, ICP, helicons
52.25.Os Emission, absorption, and scattering of electromagnetic radiation
Issue 4 (November 2004)
Received 7 October 2003
Published 15 September 2004
A Shabalin 2004 Plasma Sources Sci. Technol. 13 588
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