Electron density measurements in afterglow of high power pulsed microwave discharge

doi:10.1088/0963-0252/13/4/002

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Plasma Sources Science and Technology

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Plasma Sources Science and Technology Volume 13 Number 4 Create an alert RSS this journal

M Mesko et al 2004 Plasma Sources Sci. Technol. 13 562 doi:10.1088/0963-0252/13/4/002

Electron density measurements in afterglow of high power pulsed microwave discharge

M Mesko, Z Bonaventura, P Vasina, A Tálský, Z Frgala, V Kudrle and J Janča

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In this paper, we present experimental results of diagnostics of a high power microwave pulsed discharge (100 kW at 9 GHz, 2.5 µs) in nitrogen and oxygen gases. We used microwave interferometers operating at 15 and 35 GHz equipped with dielectric rod antennae. The operating pressure was between 20 and 2000 Pa. In nitrogen the large value of the recombination coefficient α_r = (1–2) × 10⁻⁶ cm³ s⁻¹ suggests that ${\rm N}_{2}^{ + }$ (α_r = 2 × 10⁻⁷ cm³ s⁻¹) ions coexist with the predominant complex ions, ${\rm N}_{4}^{ + }$ and ${\rm N}_{3}^{ + }$ , at pressures greater than 700 Pa. In oxygen the value of the recombination coefficient increases with increasing pressure from a value typical of ${\rm O}_{2}^{ + }$ (α_r = 3 × 10⁻⁷ cm³ s⁻¹) at a pressure of 200 Pa to a value of α_r = (2–4) × 10⁻⁶ cm³ s⁻¹ at pressures above 1000 Pa as a consequence of the formation of ${\rm O}_{4}^{ + }$ at higher pressures.