Eiji Makino and Takayuki Shibata 1998 J. Micromech. Microeng. 8 177 doi:10.1088/0960-1317/8/3/001
Micromachining compatible metal patterning technique using localized decomposition of an organometallic compound by laser irradiation
Eiji Makino and Takayuki Shibata
Show affiliationsSpin coated palladium acetate film was decomposed locally using argon ion laser irradiation and palladium thin film with a line pattern was formed. We studied the effects of the process parameters, such as laser power density and scan rate, on line pattern features and the basic characteristics of the formed palladium thin film. The film had a fine polycrystalline structure with a grain size of up to 100 nm, and high chemical purity, resulting in a low electrical resistivity of the order of 
cm. The formed line patterns had a smooth surface and flat features. Their thickness was 12% of that of the coated palladium acetate film. The width of the formed palladium line patterns was 100-200% of the spot size of the laser beam, depending on irradiation conditions, due to thermal conduction. This metal pattern deposition technique is not only very simple and flexible, but is also compatible with micromachining processes, since it is a maskless process and is easy to apply to three dimensional structures.
- PACS
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61.80.Ba Ultraviolet, visible, and infrared radiation effects (including laser radiation)
68.55.-a Thin film structure and morphology
81.40.Tv Optical and dielectric properties (related to treatment conditions)
61.82.Pv Polymers, organic compounds
85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
68.37.Hk Scanning electron microscopy (SEM) (including EBIC)
- Subjects
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Soft matter, liquids and polymers
Surfaces, interfaces and thin films
- Dates
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Issue 3 (September 1998)
Received 1 December 1997, accepted for publication 23 January 1998
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Micromachining compatible metal patterning technique using localized decomposition of an organometallic compound by laser irradiation
Eiji Makino and Takayuki Shibata 1998 J. Micromech. Microeng. 8 177
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