S K Rotich et al 1998 J. Micromech. Microeng. 8 108 doi:10.1088/0960-1317/8/2/016
S K Rotich, J G Smith, A G R Evans and A Brunnschweiler
Show affiliationsMicroscopic parabolic surfaces have been fabricated in thick positive photoresist by exposing it using a suitably designed mask on an X5 stepper projection reduction system. The resulting cylindrical parabolic surfaces were coated with reflective material to form parabolic micromirrors. Measurement results of focal length are in agreement with the expected theoretical values. The devices form the basis for the fabrication of compound parabolic microreflectors which are very suitable for thin solar cells.
85.40.Hp Lithography, masks and pattern transfer
42.82.Cr Fabrication techniques; lithography, pattern transfer
42.79.Fm Reflectors, beam splitters, and deflectors
42.79.Ek Solar collectors and concentrators
Issue 2 (June 1998)
Received 12 August 1997, accepted for publication 10 December 1997
S K Rotich et al 1998 J. Micromech. Microeng. 8 108
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