Th Kraus et al 1997 J. Micromech. Microeng. 7 196 doi:10.1088/0960-1317/7/3/031
Design and fabrication of surface micromachined micromotors with large dimensions
Th Kraus, M Baltzer and E Obermeier
Show affiliationsMicromotors with enlarged 
and 
rotor diameters are described in this paper. A large driving torque was obtained by fabricating up to 234 stator and 156 rotor electrodes. Microbridges were used to connect the stator electrodes to the electrical lines and two different electrode designs were investigated. The most favourable electrode geometry and the driving torque was determined by simulating the force per pole. The surface micromachined micromotors have been fabricated and tested successfully.
- PACS
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85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
- Subjects
- Dates
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Issue 3 (September 1997)
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Design and fabrication of surface micromachined micromotors with large dimensions
Th Kraus et al 1997 J. Micromech. Microeng. 7 196
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The Belfast EBIT
Hirofumi Watanabe and Fred Currell 2004 J. Phys.: Conf. Ser. 2 182
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International comparisons of He-Ne lasers stabilized with 127I2 at λ = 633 nm (July 1997). Part VIII: Comparison of NIM (China), NRLM (Japan), KRISS (Republic of Korea) and BIPM lasers at λ = 633 nm
S Shen et al 2001 Metrologia 38 181
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Lorentz invariance of the quantum Hall effect and the finite frequency effects
B Rosenstein and I D Vagner 1990 J. Phys.: Condens. Matter 2 497
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Adjustment of the photometric standards maintained at the BIPM
M Stock 2002 Metrologia 39 113
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A methodology for efficiently sampling the conformation space of molecular structures
Audrey Lee et al 2005 Phys. Biol. 2 S108
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Electric and magnetic properties of sub-wavelength plasmonic crystals
Gennady Shvets and Yaroslav A Urzhumov 2005 J. Opt. A: Pure Appl. Opt. 7 S23
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Ordering, metastability and phase transitions in two-dimensional systems
J M Kosterlitz and D J Thouless 1973 J. Phys. C: Solid State Phys. 6 1181
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Improved measurement accuracy and uncertainty budget of the BIPM primary standard manobarometer
M Stock and R Pello 1999 Metrologia 36 149
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Concerning the Different Tables of the Thermal Expansion of Water between 0 and 40 °C
M Menaché and G Girard 1973 Metrologia 9 62
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