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Design and fabrication of surface micromachined micromotors with large dimensions

Th Kraus, M Baltzer and E Obermeier

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Micromotors with enlarged and rotor diameters are described in this paper. A large driving torque was obtained by fabricating up to 234 stator and 156 rotor electrodes. Microbridges were used to connect the stator electrodes to the electrical lines and two different electrode designs were investigated. The most favourable electrode geometry and the driving torque was determined by simulating the force per pole. The surface micromachined micromotors have been fabricated and tested successfully.


PACS

85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices

84.50.+d Electric motors

81.20.Wk Machining, milling

Subjects

Electronics and devices

Condensed matter: structural, mechanical & thermal

Nanoscale science and low-D systems

Dates

Issue 3 (September 1997)



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