Th Kraus et al 1997 J. Micromech. Microeng. 7 196 doi:10.1088/0960-1317/7/3/031
Design and fabrication of surface micromachined micromotors with large dimensions
Th Kraus, M Baltzer and E Obermeier
Show affiliationsMicromotors with enlarged 
and 
rotor diameters are described in this paper. A large driving torque was obtained by fabricating up to 234 stator and 156 rotor electrodes. Microbridges were used to connect the stator electrodes to the electrical lines and two different electrode designs were investigated. The most favourable electrode geometry and the driving torque was determined by simulating the force per pole. The surface micromachined micromotors have been fabricated and tested successfully.
- PACS
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85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
- Subjects
- Dates
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Issue 3 (September 1997)
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Design and fabrication of surface micromachined micromotors with large dimensions
Th Kraus et al 1997 J. Micromech. Microeng. 7 196
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H Fukuzawa et al 2009 J. Phys. B: At. Mol. Opt. Phys. 42 181001
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Mechanical properties of functionalized carbon nanotubes
Z Q Zhang et al 2008 Nanotechnology 19 395702
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Characterizing singular curves in parametrized families of biquadratics
Jim Pettigrew and John A G Roberts 2008 J. Phys. A: Math. Theor. 41 115203
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Reconstruction of an electron energy distribution function using integrated data analysis
Dirk Dodt et al 2008 J. Phys. D: Appl. Phys. 41 205207
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