Th Kraus et al 1997 J. Micromech. Microeng. 7 196 doi:10.1088/0960-1317/7/3/031
Th Kraus, M Baltzer and E Obermeier
Show affiliationsMicromotors with enlarged
and
rotor diameters are described in this paper. A large driving torque was obtained by fabricating up to 234 stator and 156 rotor electrodes. Microbridges were used to connect the stator electrodes to the electrical lines and two different electrode designs were investigated. The most favourable electrode geometry and the driving torque was determined by simulating the force per pole. The surface micromachined micromotors have been fabricated and tested successfully.
85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
Issue 3 (September 1997)
Th Kraus et al 1997 J. Micromech. Microeng. 7 196
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