J C Lötters et al 1997 J. Micromech. Microeng. 7 145 doi:10.1088/0960-1317/7/3/017
The mechanical properties of the rubber elastic polymer polydimethylsiloxane for sensor applications
J C Lötters, W Olthuis, P H Veltink and P Bergveld
Show affiliationsPolydimethylsiloxane (PDMS) is a commercially available physically and chemically stable silicone rubber. It has a unique flexibility with a shear elastic modulus 
due to one of the lowest glass transition temperatures of any polymer 
. Further properties of PDMS are a low change in the shear elastic modulus versus temperature 
, virtually no change in G versus frequency and a high compressibility. Because of its clean room processability, its low curing temperature, its high flexibility, the possibility to change its functional groups and the very low drift of its properties with time and temperature, PDMS is very well suited for micromachined mechanical and chemical sensors, such as accelerometers (as the spring material) and ISFETs (as the ion selective membrane). It can also be used as an adhesive in wafer bonding, as a cover material in tactile sensors and as the mechanical decoupling zone in sensor packagings.
- PACS
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85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
07.07.Df Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing
81.40.Jj Elasticity and anelasticity, stress-strain relations
- Subjects
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Soft matter, liquids and polymers
Instrumentation and measurement
- Dates
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Issue 3 (September 1997)
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The mechanical properties of the rubber elastic polymer polydimethylsiloxane for sensor applications
J C Lötters et al 1997 J. Micromech. Microeng. 7 145
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