A Muller et al 1993 J. Micromech. Microeng. 3 158 doi:10.1088/0960-1317/3/3/017
A Muller, J Gottert and J Mohr
Show affiliationsThe LIGA process applied on micromachined silicon substrates offers new possibilities in microsystem technology, especially in micro-optics. LIGA microstructures used as fixing elements for passive micro-optical components and optical fibres are precisely adjusted to microstructures etched into silicon wafers. In this way, optical fibres and passive micro-optical components, e.g., ball lenses having different diameters can be precisely positioned at the same optical axis. In addition, other functional elements like microactuators can be integrated on the same substrate to build advanced microsystems, e.g. a switch for use with single-mode fibres.
85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
42.79.Ta Optical computers, logic elements, interconnects, switches; neural networks
07.07.Tw Servo and control equipment; robots
42.82.Cr Fabrication techniques; lithography, pattern transfer
Instrumentation and measurement
Issue 3 (September 1993)
A Muller et al 1993 J. Micromech. Microeng. 3 158
Kazuro Kageyama et al 1998 Smart Mater. Struct. 7 472
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