N Izadi et al 2010 J. Micromech. Microeng. 20 085041 doi:10.1088/0960-1317/20/8/085041
N Izadi, M J de Boer, J W Berenschot and G J M Krijnen
Show affiliationsA fabrication process is presented which allows realizing the dense arrays of fully supported flexible SU-8 membranes with integrated electrodes underneath that support cylindrical hair-like structures on the top. Electrodes have been insulated from liquid to prevent short circuit or electrolysis. The process allows a controllable distance between counter electrodes. The excess squeeze film damping is eliminated with a closed membrane configuration with backside openings. A low-power differential capacitive measurement mechanism is employed as a sensor readout. These flow sensors provide a distributed sensing mechanism inspired by the superficial neuromast as found in the lateral line system of fish. This paper focuses on the fabrication of the sensors with preliminary mechanical results demonstrating the functionality of the fabricated devices.
87.80.-y Biophysical techniques (research methods)
47.63.-b Biological fluid dynamics
47.80.-v Instrumentation and measurement methods in fluid dynamics
85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
47.61.Fg Flows in micro-electromechanical systems (MEMS) and nano-electromechanical systems (NEMS)
Issue 8 (August 2010)
Received 30 March 2010, in final form 11 June 2010
Published 28 July 2010
N Izadi et al 2010 J. Micromech. Microeng. 20 085041
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R Parthasarathy 2005 J. Phys. A: Math. Gen. 38 5379
N Straumann 2005 Class. Quantum Grav. 22 2533
R Santra et al 2007 J. Phys.: Conf. Ser. 88 012052
Sylvain Veilleux et al 2009 ApJ 700 L149
P Ingenhoven et al 2009 J. Phys.: Condens. Matter 21 415302
Baris Altunkaynak et al JHEP04(2009)114
Andrej Arbuzov JHEP03(2003)063
Michael Holmes and Brent D. Nelson JCAP07(2009)019