Edin Sarajlic et al 2009 J. Micromech. Microeng. 19 074001 doi:10.1088/0960-1317/19/7/074001
An electrostatic 3-phase linear stepper motor fabricated by vertical trench isolation technology*
Edin Sarajlic1,2, Christophe Yamahata1,3, Mauricio Cordero1 and Hiroyuki Fujita1
Show affiliationsWe present the design, microfabrication and characterization of an electrostatic 3-phase linear stepper micromotor constructed with vertical trench isolation technology. This suitable technology was used to create a monolithic stepper motor with high-aspect-ratio poles and an integrated 3-phase electrical network in the bulk of a standard single-crystal silicon wafer. The shuttle of the stepper motor is suspended by a flexure to avoid any mechanical contact during operation, enhancing the precision, repeatability and reliability of the stepping motion. The prototype is capable of a maximum travel of +/−26 µm (52 µm) at an actuation voltage of 30 V and a step size of 1.4 µm during a half-stepping sequence.
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Issue 7 (July 2009)
Received 19 December 2008, in final form 11 February 2009
Published 30 June 2009
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An electrostatic 3-phase linear stepper motor fabricated by vertical trench isolation technology
Edin Sarajlic et al 2009 J. Micromech. Microeng. 19 074001
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