Vikram Mukundan et al 2009 J. Micromech. Microeng. 19 065008 doi:10.1088/0960-1317/19/6/065008
Vikram Mukundan1, Pierre Ponce2, Holly E Butterfield1 and Beth L Pruitt1
Show affiliationsOperation of electrostatic actuators in liquid media has various proposed applications, especially in biological environments. The devices are operated by modulating at a frequency higher than the relaxation rate of the ions in solution. We present circuit models based on electric double layer theories to obtain an analytical expression for the frequency-dependent force response of electrostatic actuators in ionic media. The model has been compared with experimental measurements of actuation in media of conductivity spanning five orders of magnitude. Further, impedance spectroscopy is used to measure the values of the circuit models, which are compared with the experiments. These measurements also quantify the parasitic impedances in the devices. A conformal layer of parylene-C is demonstrated as a passivation scheme for the electrodes in corrosive media. The heating effects due to parasitic impedances are also quantified by temperature measurements of devices in fluids.
85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
07.07.Tw Servo and control equipment; robots
Issue 6 (June 2009)
Received 9 December 2008, in final form 12 March 2009
Published 18 May 2009
Vikram Mukundan et al 2009 J. Micromech. Microeng. 19 065008
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