Julian Gonska et al 2009 J. Micromech. Microeng. 19 127002 doi:10.1088/0960-1317/19/12/127002
Application of hydrogel-coated microcantilevers as sensing elements for pH
Julian Gonska1, Christoph Schelling1 and Gerald Urban2,3
Show affiliationsTECHNICAL NOTE
This note reports on cantilever-based sensor elements coated with a hydrogel. The hydrogel responds with a volume change on varying the pH value of surrounding liquids. The change in volume leads to a static deflection of the cantilevers, which is detected using integrated piezoresistors. To increase deflection sensitivity of the sensor elements, sub-micron, multilayered cantilevers consisting of polycrystalline silicon and silicon oxide are used. A new cantilever design is developed, which decreases the cantilever sensitivity to in situ stresses and thermal bimorph effects. A theoretical model for the sensor elements is introduced providing the output signal of multiple cantilevers connected in a full Wheatstone bridge. Measurements of deflection sensitivity prove the theoretical model. Finally, the cantilevers are coated with a 2-hydroxyethyl methacrylate and 2-(dimethylamino) ethyl methacrylate copolymer-based hydrogel, and changes in the pH value from pH 4 to pH 10 are measured.
- PACS
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07.07.Df Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing
84.32.Ff Conductors, resistors (including thermistors, varistors, and photoresistors)
85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
82.80.-d Chemical analysis and related physical methods of analysis
- Subjects
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Soft matter, liquids and polymers
Instrumentation and measurement
- Dates
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Issue 12 (December 2009)
Received 1 September 2009
Published 11 November 2009
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Application of hydrogel-coated microcantilevers as sensing elements for pH
Julian Gonska et al 2009 J. Micromech. Microeng. 19 127002
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