Quick search Find article
Quick search
Find article

Transient response and stability of the AGC-PI closed-loop controlled MEMS vibratory gyroscopes

J Cui, X Z Chi, H T Ding, L T Lin, Z C Yang and G Z Yan

Show affiliations


This paper presents a detailed study on the transient response and stability of the automatic gain control (AGC) with a proportion-integral (PI) controller for a MEMS vibratory gyroscope, which constructs a closed-loop control system to make the gyroscope achieve a constant amplitude vibration at its resonant frequency. The nonlinear mathematical model for the control system is established by applying the averaging and linearization method, which is evaluated through numerical simulations. The stability and convergence characteristics of the whole loop are investigated by using the phase plane method and Routh–Hurwitz criterion. The analysis provides a quantitative methodology for selecting the system parameters to approach stability and an optimal transient response. The negative impact induced by drift of the resonant frequency and Q-factor is also discussed. Simulation results predicted by the model are shown to be in close agreement with the experimental results carried out on a doubly decoupled bulk micromachined gyroscope. By optimizing the control parameters, the measured rising time is less than 100 ms without obvious overshoot. The setting time of the whole loop is less than 200 ms with the relative fluctuation of velocity amplitude within approximately 16 ppm for an hour. The resulting overall performance of the gyroscope is tested under atmospheric pressure. The resonant frequencies and the Q-factor of the drive mode and sense mode are 2.986 kHz, 213 and 3.199 kHz, 233, respectively. The gyroscope achieves a scale factor of 27.6 mV/deg/s with nonlinearity less than 120 ppm in the full-scale range of 800° s−1. The threshold of sensitivity is measured to be about 0.005° s−1 with noise equivalent angular rate evaluated to be 0.001°/s/Hz1/2.


PACS

85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices

07.05.Dz Control systems

07.10.Fq Vibration isolation

07.10.Cm Micromechanical devices and systems

Subjects

Electronics and devices

Instrumentation and measurement

Nanoscale science and low-D systems

Dates

Issue 12 (December 2009)

Received 6 May 2009

Published 5 November 2009



  1. Transient response and stability of the AGC-PI closed-loop controlled MEMS vibratory gyroscopes

    J Cui et al 2009 J. Micromech. Microeng. 19 125015

  2. Solar Wind Helium Abundance as a Function of Speed and Heliographic Latitude: Variation through a Solar Cycle

    Justin C. Kasper et al. 2007 ApJ 660 901

  3. Probability density functions in binary mixtures

    Pedro Sancho 1998 J. Phys. A: Math. Gen. 31 6409

  4. The effect of H± on B± → τ±ντ and B± → μ±νμ

    A G Akeroyd and S Recksiegel 2003 J. Phys. G: Nucl. Part. Phys. 29 2311

  5. Resonant suppression and feedback control of anomalous induced backscattering by the pump frequency modulation

    V I Arkhipenko et al 2009 Plasma Phys. Control. Fusion 51 125005

  6. Diffuse Interstellar Bands Toward HD 62542

    Máté Ádámkovics et al. 2005 ApJ 625 857

  7. Quantum mechanics-classical molecular dynamics approach to EXAFS

    Alexei Kuzmin and Robert A Evarestov 2009 J. Phys.: Conf. Ser. 190 012024

  8. Spectroscopy of strontium Rydberg states using electromagnetically induced transparency

    S Mauger et al 2007 J. Phys. B: At. Mol. Opt. Phys. 40 F319

  9. Kinetics of iron redox reaction in silicate melts: A high temperature Xanes study on an alkali basalt

    B Cochain et al 2009 J. Phys.: Conf. Ser. 190 012182

  10. CH4 ionization and dissociation by proton and electron impact

    H Luna et al 2003 J. Phys. B: At. Mol. Opt. Phys. 36 4717

View by subject




Export








Please login to access our web services, or create an account if you don't yet have one.

You must have cookies enabled in your web browser to be able to login.

Username
Password

Forgotten your password? Get a new one here.