Cunxia Li et al 2009 J. Micromech. Microeng. 19 125007 doi:10.1088/0960-1317/19/12/125007
Cunxia Li, Tao Chen, Jinhai Si, Feng Chen, Xu Shi and Xun Hou
Show affiliationsWe report on photo-induced microchannels created within single-crystal silicon using 800 nm femtosecond laser pulses. The 800 nm wavelength is in the absorption region of silicon. Using combined transverse scanning and longitudinal scanning, we can fabricate arbitrary three-dimensional microchannels in the interior of silicon, to a depth of several hundred micrometers, without surface damage. The diameter of the photo-induced microchannels can be controlled by varying laser power, scan velocity and focal depth.
Issue 12 (December 2009)
Received 3 August 2009, in final form 23 September 2009
Published 20 October 2009
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