F Merola et al 2009 J. Micromech. Microeng. 19 125006 doi:10.1088/0960-1317/19/12/125006
F Merola1,2, M Paturzo1, S Coppola1, V Vespini1 and P Ferraro1
Show affiliationsMicrolens arrays are realized through a self-arrangement process of thin liquid polymeric polydimethylsiloxane (PDMS) film on a functionalized polar dielectric crystal substrate. The self-arrangement process is named the pyro-electro-wetting mechanism. The substrate, a LiNbO3 (LN) z-cut wafer, has been micro-engineered with periodically poled ferroelectric domains, with the aim to provide an appropriate wettability patterning induced by a thermal stimulus. Different experimental procedures have been explored demonstrating that arrays of thousands of microlenses, having a diameter size of 100 µm and focal lengths ranging between 300 and 1100 µm, can be fabricated. Furthermore, a microscope interference method based on digital holography is adopted for microlens characterization.
77.80.Dj Domain structure; hysteresis
61.41.+e Polymers, elastomers, and plastics
42.82.Cr Fabrication techniques; lithography, pattern transfer
Soft matter, liquids and polymers
Condensed matter: electrical, magnetic and optical
Issue 12 (December 2009)
Received 2 July 2009, in final form 9 September 2009
Published 20 October 2009
F Merola et al 2009 J. Micromech. Microeng. 19 125006
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