A Tibrewala et al 2009 J. Micromech. Microeng. 19 125005 doi:10.1088/0960-1317/19/12/125005
Development, fabrication and characterization of a 3D tactile sensor
A Tibrewala, A Phataralaoha and S Büttgenbach
Show affiliationsIn this paper, a touch trigger probe using one- and five-boss cross-shaped membranes is proposed, which can be used in coordinate measuring machines for three-dimensional measurements. Silicon bulk micromachining is utilized to fabricate force sensors. Four different piezoresistor layouts are characterized in this work. A maximum sensitivity of 3.01 mV V−1 mN−1 and 11.29 mV V−1 mN−1 is obtained, respectively, when vertical and lateral loads are applied on one-boss design. The horizontal to vertical stiffness ratio is decreased from 1:37.5 to 1:2.25 when a five-boss design was used compared to a one-boss design. The sensors' ability to measure both normal and shear forces with high linearity is demonstrated by means of tests performed by applying forces between 0 and 25 mN.
- PACS
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07.07.Df Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing
84.32.Ff Conductors, resistors (including thermistors, varistors, and photoresistors)
85.50.-n Dielectric, ferroelectric, and piezoelectric devices
- Subjects
- Dates
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Issue 12 (December 2009)
Received 22 June 2009, in final form 16 September 2009
Published 20 October 2009
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Development, fabrication and characterization of a 3D tactile sensor
A Tibrewala et al 2009 J. Micromech. Microeng. 19 125005
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