Imed Zine-El-Abidine and Peng Yang 2009 J. Micromech. Microeng. 19 125004 doi:10.1088/0960-1317/19/12/125004
Imed Zine-El-Abidine and Peng Yang
Show affiliationsThis paper presents a tunable comb resonator by mechanically altering the suspension configuration to change its spring constant. The change of the stiffness of the resonator is achieved using electrostatic MEMS actuators. The MEMS actuators mechanically change the length of the beams to increase their spring constant and therefore the resonant frequency. The resonant frequency changed from the original value of 10.8 kHz to 17.6 kHz and 21.4 kHz depending on the spring configuration. The tunable mechanical resonator has been designed numerically using Coventorware and validated with experimental characterization. The device is built using a silicon-on-insulator (SOI) process.
85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
Issue 12 (December 2009)
Received 23 July 2009, in final form 2 September 2009
Published 20 October 2009
Imed Zine-El-Abidine and Peng Yang 2009 J. Micromech. Microeng. 19 125004
A. Marek and H.-Th. Janka 2009 ApJ 694 664
I Carusotto and Y Castin 2001 J. Phys. B: At. Mol. Opt. Phys. 34 4589
P Lévay 2002 J. Phys. A: Math. Gen. 35 6431
Paul Erhart et al 2006 J. Phys.: Condens. Matter 18 6585
B L Burrows and M Cohen 2003 J. Phys. A: Math. Gen. 36 11643
E Doméjean et al 1997 J. Phys. D: Appl. Phys. 30 2132
Evgueni Kleimenov et al 2009 J. Phys.: Conf. Ser. 190 012035
Markus J. Aschwanden et al. 2007 ApJ 656 577
A Barrat et al 2005 J. Phys.: Condens. Matter 17 S2429