O Ducloux et al 2009 J. Micromech. Microeng. 19 115031 doi:10.1088/0960-1317/19/11/115031
A magnetically actuated, high momentum rate MEMS pulsed microjet for active flow control
O Ducloux1, R Viard1, A Talbi1, L Gimeno2, Y Deblock3, P Pernod1, V Preobrazhensky1 and A Merlen2
Show affiliationsA small-sized, high momentum rate (>10−2 N), dynamically actuated microvalve fulfilling the functional specifications for active aerodynamic flow control was designed, fabricated and characterized. The prototype consists of a microfabricated silicon channel pinched by an actuated poly(dimethyl siloxane) (PDMS) polymer membrane. Actuation is provided by coupling an inductive driving coil and a NdFeB permanent magnet fixed on the PDMS elastomeric membrane. The development of a specific microfabrication process, and a complete characterization of the fabricated prototypes are presented in this paper. The yield air microjet performances reach 150 m s−1 for an actuation frequency situated in the range [0 Hz–400 Hz] and an outlet area of about 1 
. Experimental results also show that the use of a vectoring plate placed at the outlet of the microvalve provided not only easier integration of the microsystem, but also improved the penetration of the microjet into the main flow.
- PACS
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85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
47.61.Fg Flows in micro-electromechanical systems (MEMS) and nano-electromechanical systems (NEMS)
- Subjects
- Dates
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Issue 11 (November 2009)
Received 7 April 2009, in final form 4 September 2009
Published 20 October 2009
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A magnetically actuated, high momentum rate MEMS pulsed microjet for active flow control
O Ducloux et al 2009 J. Micromech. Microeng. 19 115031
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