Jonathan R Felts and William P King 2009 J. Micromech. Microeng. 19 115008 doi:10.1088/0960-1317/19/11/115008
Jonathan R Felts and William P King1
Show affiliationsWe describe an atomic force microscope cantilever design for which the second flexural mode frequency can be tailored relative to the first mode frequency, for operation in contact with a substrate. A freely resonating paddle internal to the cantilever reduces the stiffness of the second flexural mode relative to the first while nearly maintaining the mass of the original cantilever. Finite element analysis is used to predict the performance of various cantilever designs and several cantilevers are fabricated and tested. This strategy allows the ratio of the first two resonant modes f2/f1 to be controlled over the range 1.6–4.5. The ability to vary f2/f1 could improve a variety of dynamic contact-mode measurements.
07.79.Lh Atomic force microscopes
85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
Issue 11 (November 2009)
Received 27 June 2009, in final form 21 August 2009
Published 5 October 2009
Jonathan R Felts and William P King 2009 J. Micromech. Microeng. 19 115008
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