Nimai C Nayak et al 2008 J. Micromech. Microeng. 18 095020 doi:10.1088/0960-1317/18/9/095020
Nimai C Nayak1, Y C Lam1,2, C Y Yue1,2 and Ayan T Sinha3
Show affiliationsThis paper reports an investigation on the effects of laser power and processing speed on the depth, width and surface profiles of microchannels manufactured from polymethyl methacrylate (PMMA) of various molecular weights. The CO2 laser employed has a wavelength of 10.6 µm and a maximum power of 25 W. The power used for channel fabrication varied between 0.275 and 2.5 W and the cutting speed ranged from 7.0 to 64 mm s−1. It is observed that the channel depth varies linearly with an increase in laser power at a particular speed. For a prescribed laser power, the channel depth decreased with an increase in laser speed for all the grades of PMMA. The channel width increased with an increase in laser power but decreased with an increase in speed. There is a decrease in the depth of the microchannels with an increase in the molecular weight of PMMA. Though the width decreases with an increase in molecular weights of PMMA, 96.7 kDa PMMA has a smaller width than 120 kDa PMMA which is due to the formation of bulges on the channel rim. The surface profiles of the microchannels were examined by a scanning electron microscope. It is observed that pore formation increased with an increase in molecular weight.
07.10.Cm Micromechanical devices and systems
61.41.+e Polymers, elastomers, and plastics
68.37.Hk Scanning electron microscopy (SEM) (including EBIC)
42.55.Lt Gas lasers including excimer and metal-vapor lasers
Soft matter, liquids and polymers
Instrumentation and measurement
Surfaces, interfaces and thin films
Issue 9 (September 2008)
Received 28 April 2008, in final form 22 July 2008
Published 13 August 2008
Nimai C Nayak et al 2008 J. Micromech. Microeng. 18 095020
Ko Hermans et al 2008 J. Micromech. Microeng. 18 095022
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