V Desmaris et al 2008 J. Micromech. Microeng. 18 095004 doi:10.1088/0960-1317/18/9/095004
V Desmaris, D Meledin, A Pavolotsky, R Monje and V Belitsky
Show affiliationsA novel technology for the manufacturing of micromachined all-metal waveguide circuits and structures for frequency bands ranging from 200 up to 7000 GHz (sub-millimetre and THz) is presented. The waveguide circuits are formed by using metal electroplating with preceding sputtering of a thin metal film seed layer over a photo-lithographically patterned thick SU-8 photoresist. The process provides the possibility of making three-dimensional structures via facilitating multi-level (layered) designs. The surface roughness of the THz waveguide structure was demonstrated to be as low as 30 nm. This technology was used to build a state-of-the-art waveguide balanced 1.3 THz hot electron bolometer mixer and other applications for radio astronomy instrumentation.
84.40.Az Waveguides, transmission lines, striplines
85.40.Hp Lithography, masks and pattern transfer
85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
84.30.Qi Modulators and demodulators; discriminators, comparators, mixers, limiters, and compressors
Issue 9 (September 2008)
Received 30 May 2008, in final form 23 June 2008
Published 24 July 2008
V Desmaris et al 2008 J. Micromech. Microeng. 18 095004
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