M J Lopez et al 2008 J. Micromech. Microeng. 18 075021 doi:10.1088/0960-1317/18/7/075021
M J Lopez1, D Caballero2, E M Campo1,3, R Perez-Castillejos1,4, A Errachid2, J Esteve1 and J A Plaza1
Show affiliationsNovel medical and biological applications are driving increased interest in the fabrication of micropipette or micro-dispensers. Reduced volume samples and drug dosages are prime motivators in this effort. We have combined microfabrication technology with ion beam milling techniques to successfully produce cantilever-type polysilicon micro-dispensers with 3D enclosed microchannels. The microfabrication technology described here allows for the designing of nozzles with multiple shapes. The contribution of ion beam milling has had a large impact on the fabrication process and on further customizing shapes of nozzles and inlet ports. Functionalization tests were conducted to prove the viability of ion beam-fabricated micro-dispensers. Self-assembled monolayers were successfully formed when a gold surface was patterned with a thiol solution dispensed by the fabricated micro-dispensers.
85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
Issue 7 (July 2008)
Received 13 March 2008, in final form 30 April 2008
Published 9 June 2008
M J Lopez et al 2008 J. Micromech. Microeng. 18 075021
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