X Ding et al 2008 J. Micromech. Microeng. 18 075017 doi:10.1088/0960-1317/18/7/075017
Fabrication of a micro-size diamond tool using a focused ion beam
X Ding1, G C Lim1, C K Cheng2, David Lee Butler1,3, K C Shaw1, K Liu1 and W S Fong1
Show affiliationsAn investigation on the feasibility of sputtering a diamond block into a specially designed three-dimensional cutting tool shape using a focused ion beam (FIB) was carried out. The ion-sputtered removal rate, surface morphology and sputtered feature accuracy were evaluated with respect to the FIB parameters such as ion current and angle of ion incidence through sputtering pockets on the top surface of a diamond substrate. A single crystalline diamond tool, with 25 µm length in the cutting edge and smooth face quality, has been successfully fabricated by using a FIB. These excellent tool characteristics are proven in the results obtained from the machining experiments done on the ultra-precision machine.
- PACS
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79.20.Rf Atomic, molecular, and ion beam impact and interactions with surfaces
68.35.B- Structure of clean surfaces (and surface reconstruction)
- Subjects
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Condensed matter: electrical, magnetic and optical
Instrumentation and measurement
- Dates
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Issue 7 (July 2008)
Received 5 April 2008
Published 9 June 2008
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Fabrication of a micro-size diamond tool using a focused ion beam
X Ding et al 2008 J. Micromech. Microeng. 18 075017
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-
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-
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