A chip-sized arrayed actuator device has been developed for application to a tactile display. Each actuator uses a liquid–vapour phase change to drive a microneedle that stimulates receptors in a finger in contact with the array. The actuators have a flexible diaphragm structure and a bottom plate bonded together to create a cavity between them. A microneedle and a microheater are formed on the diaphragm and plate of each actuator, respectively. The sealed cavity is filled with an operating liquid. Activating the heater and generating bubbles, which is similar to the process of a thermal ink jet, increase the pressure in the cavity. As a result, the flexible membrane deforms and it drives the needle upwards to stimulate receptors. Microelectromechanical systems technologies are used to fabricate the three components of the actuators, which are manually assembled to form a 3 × 3 arrayed actuator device. The total size of the device is 15 × 15 × 1 mm. The device performance is experimentally evaluated and a large needle displacement (61 µm) is obtained with an input energy of 457 mJ.