Rob Gagler et al 2008 J. Micromech. Microeng. 18 055025 doi:10.1088/0960-1317/18/5/055025
Rob Gagler1, Alejandro Bugacov1, Bruce E Koel1,3 and Peter M Will2
Show affiliationsThis paper presents results on the development and fabrication of hollow 3D, programmable-volume, micro-scale, artificial, non-biological volume cells or voxels. The standardized silicon wafer processing method PolyMUMPs® was used to construct a variety of polysilicon devices capable of being folded from two-dimensional shapes into three-dimensional regular solids with dimensions in the order of 40–80 µm per side. Folding of the devices was performed by a combination of magnetic and surface tension forces in water. Complete closure of pyramidal structures with dimensions down to 40 µm per side was achieved, as well as folding of five-sided boxes and half-dodecahedrons (lotuses) with dimensions down to 40 µm per side.
85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
Condensed matter: electrical, magnetic and optical
Issue 5 (May 2008)
Received 17 December 2007, in final form 19 February 2008
Published 15 April 2008
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