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Hydrophobic coating of microfluidic chips structured by SU-8 polymer for segmented flow operation

J T Schumacher1, A Grodrian1, C Kremin2, M Hoffmann2 and J Metze1

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We present a hydrophobization procedure for SU-8-based microfluidic chips on borofloat substrates. Different layouts of gold electrodes passivated by the polymer have been investigated. The chips are used for segmented flow in a two-fluid mode that requires a distinct hydrophobicity of the channel walls which is generated by the use of specific silane. In this paper we describe the production and silanization of the chips and demonstrate segmented flow operation.


PACS

47.85.Np Fluidics

47.61.-k Micro- and nano- scale flow phenomena

47.57.Ng Polymers and polymer solutions

47.60.-i Flow phenomena in quasi-one-dimensional systems

Subjects

Soft matter, liquids and polymers

Fluid dynamics

Dates

Issue 5 (May 2008)

Received 7 January 2008, in final form 10 March 2008

Published 4 April 2008



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