J T Schumacher et al 2008 J. Micromech. Microeng. 18 055019 doi:10.1088/0960-1317/18/5/055019
J T Schumacher1, A Grodrian1, C Kremin2, M Hoffmann2 and J Metze1
Show affiliationsWe present a hydrophobization procedure for SU-8-based microfluidic chips on borofloat substrates. Different layouts of gold electrodes passivated by the polymer have been investigated. The chips are used for segmented flow in a two-fluid mode that requires a distinct hydrophobicity of the channel walls which is generated by the use of specific silane. In this paper we describe the production and silanization of the chips and demonstrate segmented flow operation.
47.61.-k Micro- and nano- scale flow phenomena
Issue 5 (May 2008)
Received 7 January 2008, in final form 10 March 2008
Published 4 April 2008
J T Schumacher et al 2008 J. Micromech. Microeng. 18 055019
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