Keekyoung Kim et al 2008 J. Micromech. Microeng. 18 055013 doi:10.1088/0960-1317/18/5/055013
Keekyoung Kim, Xinyu Liu, Yong Zhang and Yu Sun
Show affiliationsAs mechanical end-effectors, microgrippers enable the pick–transport–place of micrometer-sized objects, such as manipulation and positioning of biological cells in an aqueous environment. This paper reports on a monolithic MEMS-based microgripper with integrated force feedback along two axes and presents the first demonstration of force- controlled micro-grasping at the nanonewton force level. The system manipulates highly deformable biomaterials (porcine interstitial cells) in an aqueous environment using a microgripper that integrates a V-beam electrothermal microactuator and two capacitive force sensors, one for contact detection (force resolution: 38.5 nN) and the other for gripping force measurements (force resolution: 19.9 nN). The MEMS-based microgripper and the force control system experimentally demonstrate the capability of rapid contact detection and reliable force-controlled micrograsping to accommodate variations in size and mechanical properties of objects with a high reproducibility.
87.80.Fe Micromanipulation of biological structures
85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
Issue 5 (May 2008)
Received 24 January 2008, in final form 26 February 2008
Published 1 April 2008
Keekyoung Kim et al 2008 J. Micromech. Microeng. 18 055013
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