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Three-dimensional simulation of powder blasting with a polymer mask using a cellular automaton

Hiromasa Yagyu1,2 and Osamu Tabata1

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A three-dimensional (3D) simulation for micropowder blasting was carried out for the first time to predict the convex corner structure of a processed glass substrate with patterned mask erosion. The simulator utilized a cellular automaton algorithm which consisted of combinations of two orthogonal planes of two-dimensional (2D) cells and a solid particle erosion model. It was confirmed that the effect of erosion at the convex corner of the mask on the glass processing profile, which cannot be predicted in the previous 2D simulation, was successfully simulated using our 3D simulator.


PACS

81.20.Ev Powder processing: powder metallurgy, compaction, sintering, mechanical alloying, and granulation

61.43.Fs Glasses

85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices

07.10.Cm Micromechanical devices and systems

Subjects

Electronics and devices

Instrumentation and measurement

Nanoscale science and low-D systems

Condensed matter: structural, mechanical & thermal

Dates

Issue 5 (May 2008)

Received 3 November 2007, in final form 3 February 2008

Published 1 April 2008



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