Hiromasa Yagyu and Osamu Tabata 2008 J. Micromech. Microeng. 18 055010 doi:10.1088/0960-1317/18/5/055010
Hiromasa Yagyu1,2 and Osamu Tabata1
Show affiliationsA three-dimensional (3D) simulation for micropowder blasting was carried out for the first time to predict the convex corner structure of a processed glass substrate with patterned mask erosion. The simulator utilized a cellular automaton algorithm which consisted of combinations of two orthogonal planes of two-dimensional (2D) cells and a solid particle erosion model. It was confirmed that the effect of erosion at the convex corner of the mask on the glass processing profile, which cannot be predicted in the previous 2D simulation, was successfully simulated using our 3D simulator.
85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
Instrumentation and measurement
Issue 5 (May 2008)
Received 3 November 2007, in final form 3 February 2008
Published 1 April 2008
Hiromasa Yagyu and Osamu Tabata 2008 J. Micromech. Microeng. 18 055010
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