S Bermejo et al 2008 J. Micromech. Microeng. 18 055004 doi:10.1088/0960-1317/18/5/055004
S Bermejo, D Molinero, P Ortega and L Castañer
Show affiliationsThe dynamics of novel optocoupler direct driving of a microelectromechanical systems (MEMS) switch is described by means of PSpice simulations and experimental measurements. The output circuit of an optocoupler array is used to drive an electrostatic MEMS switch. It is shown that the optocoupler drive provides built-in dc voltage step-up conversion with no ripple, galvanic isolation and switching time and energy control in a similar way as current drive does. PSpice models describe the actuation theory including parasitic elements, which can modify the actuation characteristics. Comparison between theory and measurements shows that although there is great impact of parasitic parallel resistance and capacitance, current drive benefits are mostly preserved.
85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
Issue 5 (May 2008)
Received 26 October 2007, in final form 17 February 2008
Published 20 March 2008
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