Quick search Find article
Quick search
Find article

Readily integrated, electrically controlled microvalves

W H Song, J Kwan, G V Kaigala, V N Hoang and C J Backhouse

Show affiliations


We present a simple method for fabricating and operating normally open, electrothermally actuated microvalves. These valves are fabricated by placing a gas-permeable elastomeric membrane between two etched glass plates. The reservoirs and channels on one layer are filled with a low melting point polymer (polyethylene glycol, PEG) that exhibits a large volumetric change (of up to 30%) upon phase transition (melting). This volume expansion is used to actuate the membrane and seal the microfluidic channels located in the second etched glass plate. The PEG in the reservoir is heated with integrated patterned platinum-resistive elements. The valve reliably seals the microfluidic channel against external fluid pressures of 10 psi. This valve can be readily integrated with one of the standard technologies for lab-on-a-chip (LOC) fabrication and is suitable for use with the polymerase chain reaction. The novelty of this microvalve lies in the ability to fill dead-end microchannels with a polymer, its self-sealing ability, the ability to remotely actuate the valve by transferring pressure via a microchannel and the compatibility of this microvalve with standard LOC technologies.


PACS

47.85.Np Fluidics

47.60.-i Flow phenomena in quasi-one-dimensional systems

47.61.Fg Flows in micro-electromechanical systems (MEMS) and nano-electromechanical systems (NEMS)

Subjects

Fluid dynamics

Dates

Issue 4 (April 2008)

Received 2 September 2007, in final form 6 December 2007

Published 5 March 2008



  1. Readily integrated, electrically controlled microvalves

    W H Song et al 2008 J. Micromech. Microeng. 18 045009

  2. The cosmic ray energy spectrum above 4*1017 eV as measured by the Haverah Park array

    M A Lawrence et al 1991 J. Phys. G: Nucl. Part. Phys. 17 733

  3. Energy spectrum of primary cosmic rays above 1017.0 eV determined from extensive air shower experiments at Akeno

    M Nagano et al 1992 J. Phys. G: Nucl. Part. Phys. 18 423

  4. Clock synchronization by remote detection of correlated photon pairs

    Caleb Ho et al 2009 New J. Phys. 11 045011

  5. Limits of renormalizable polynomials

    Hiroyuki Inou 2006 Nonlinearity 19 1769

View by subject




Export








Please login to access our web services, or create an account if you don't yet have one.

You must have cookies enabled in your web browser to be able to login.

Username
Password

Forgotten your password? Get a new one here.