Chun-Yin Tsai et al 2008 J. Micromech. Microeng. 18 045001 doi:10.1088/0960-1317/18/4/045001
Chun-Yin Tsai, Wei-Ting Kuo, Chi-Bao Lin and Tsung-Lin Chen
Show affiliationsThis paper presents a novel design of MEMS logic gate that can perform Boolean algebra the same as logic devices that are composed of solid-state transistors. This MEMS logic gate design inherits all the advantages from MEMS switches and thus is expected to have more applications than MEMS switches. One unique feature of this device is that it can perform either NAND gate or NOR gate functions with the same mechanical structure but with different electrical interconnects. In a prototype design, the device is 250 µm long, 100 µm wide and has 1 µm gap. The experimental results show that this device can operate at 10/0 V and achieve the proposed logic functions. The resonant frequency of the device is measured roughly at 30 kHz. Due to no metal-to-metal contact in the current device, the logic functions of the design are verified through observations and video taping.
85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
Issue 4 (April 2008)
Received 28 November 2007, in final form 21 January 2008
Published 22 February 2008
Chun-Yin Tsai et al 2008 J. Micromech. Microeng. 18 045001
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