Y D Yan et al 2008 J. Micromech. Microeng. 18 035002 doi:10.1088/0960-1317/18/3/035002
Y D Yan, T Sun, X S Zhao, Z J Hu and S Dong
Show affiliationsAn AFM-based mechanical scratching technique is employed to fabricate microstructures with a depth of several nanometers on the surface of a micro (the diameter is 0.1–0.5 mm) thin wall and a hollow (the thickness of the wall is 0.8–1.2 µm) glass target ball. Based on analysis of the materials removal mechanism on the hollow target ball surface by an AFM diamond tip, effects of the normal load, fixed conditions on the machining process are studied. Using the AFM-based nanomachining system which is integrated with a high-precision stage, triangular and circular microstructures are fabricated on the target ball surface. Moreover, square taper holes are fabricated by this technique which solves the problems of fabrication of micro inflation holes in inertial confinement fusion (ICF) experiments. It indicates that the AFM-based mechanical machining approach has potential applications in the fields of machining a curved surface and real three-dimensional microstructures.
68.37.Ps Atomic force microscopy (AFM)
68.35.B- Structure of clean surfaces (and surface reconstruction)
Issue 3 (March 2008)
Received 18 September 2007, in final form 27 November 2007
Published 17 January 2008
Y D Yan et al 2008 J. Micromech. Microeng. 18 035002
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