N Liu et al 2008 J. Micromech. Microeng. 18 027001 doi:10.1088/0960-1317/18/2/027001
N Liu1, Q Xie2, W M Huang1, S J Phee1 and N Q Guo1
Show affiliationsUtilizing the significant shape recovery ability (in the order of 100% strain) in shape memory polymers (SMPs), we propose two simple approaches, namely laser heating and indentation, to produce micro-sized protrusion arrays. In the former, after local laser heating a pre-compressed SMP, protrusive bumps can be produced. In the latter, through an indentation-polishing-heating process, various shaped protrusive bumps can be produced. It is to demonstrate that indentation is a more convenient and powerful approach than laser heating, since well controlled, different shaped protrusion arrays can be realized.
85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
61.80.Ba Ultraviolet, visible, and infrared radiation effects (including laser radiation)
Issue 2 (February 2008)
Received 16 November 2007, in final form 30 November 2007
Published 4 January 2008
N Liu et al 2008 J. Micromech. Microeng. 18 027001
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