Valtteri Kalima et al 2008 J. Micromech. Microeng. 18 025020 doi:10.1088/0960-1317/18/2/025020
Valtteri Kalima1, Samuli Siitonen2, Petri Karvinen2, Mika Suvanto1, Markku Kuittinen2 and Tuula T Pakkanen1
Show affiliationsTwo transparent semi-crystalline poly(4-methyl-1-pentene) copolymers (P4MP1) of different molar mass distributions were used for injection molding of high aspect ratio (height/width) diffractive gratings. High quality sub-micron and micron features with aspect ratios of 1.6:1 were obtained with low mold temperatures. According to SEM and AFM measurements, replication of the features depended on substrate thickness and polymer. The copolymer with lower Mn and Mw penetrated deeper into the feature cavities in thin substrates, but showed poorer thermal stability and replication fidelity.
61.41.+e Polymers, elastomers, and plastics
68.37.Hk Scanning electron microscopy (SEM) (including EBIC)
82.35.Jk Copolymers, phase transitions, structure
Soft matter, liquids and polymers
Surfaces, interfaces and thin films
Issue 2 (February 2008)
Received 5 November 2007
Published 9 January 2008
Valtteri Kalima et al 2008 J. Micromech. Microeng. 18 025020
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