Jong Girl Ok et al 2008 J. Micromech. Microeng. 18 025007 doi:10.1088/0960-1317/18/2/025007
Jong Girl Ok1,2, Bo Hyun Kim3, Do Kwan Chung2, Woo Yong Sung2, Seung Min Lee2, Se Won Lee2, Wal Jun Kim2, Jin Woo Park2, Chong Nam Chu2 and Yong Hyup Kim2,4
Show affiliationsA reliable and precise machining process, electrical discharge machining (EDM), was investigated in depth as a novel method for the engineering of carbon nanomaterials. The machining characteristics of EDM applied to carbon nanomaterials 'in air' were systematically examined using scanning electron microscopy (SEM), high-resolution transmission electron microscopy (HR-TEM), energy-dispersive x-ray spectroscopy (EDS), x-ray photoelectron spectroscopy (XPS) and Raman spectroscopy. The EDM process turned out to 'melt' carbon nanomaterials with the thermal energy generated by electrical discharge, which makes both the materially and geometrically unrestricted machining of nanomaterials possible. Since the EDM process conducted in air requires neither direct contact nor chemical agents, it protects the carbon nanomaterial workpieces against physical damage and unnecessary contamination. From this EDM method, several advanced field emission applications including 'top-down' patterning and the creative lateral comb-type triode device were derived, while our previously reported study on emission uniformity enhancement by the EDM method was also referenced. The EDM method has great potential as a clean, effective and practical way to utilize carbon nanomaterials for various uses.
79.60.Jv Interfaces; heterostructures; nanostructures
68.37.Hk Scanning electron microscopy (SEM) (including EBIC)
79.70.+q Field emission, ionization, evaporation, and desorption
Condensed matter: electrical, magnetic and optical
Surfaces, interfaces and thin films
Issue 2 (February 2008)
Received 26 July 2007, in final form 25 October 2007
Published 21 December 2007
Jong Girl Ok et al 2008 J. Micromech. Microeng. 18 025007
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