H Getu et al 2008 J. Micromech. Microeng. 18 115010 doi:10.1088/0960-1317/18/11/115010
H Getu1, J K Spelt2 and M Papini1,3
Show affiliationsThe abrasive jet micromachining (AJM) of elastomers and polymers such as polydimethylsiloxane (PDMS), acrylonitrile butadiene styrene (ABS) and polytetrafluoroethylene (PTFE) for use in micro-fluidic devices was found to be very slow or impossible at room temperature. To enhance the material removal rate in such materials, a stream of liquid nitrogen (LN2) was injected into the abrasive jet, cooling the target to cryogenic temperatures. Erosion rate measurements on the three polymeric materials (PDMS, ABS and PTFE) with and without the use of LN2 were compared along with the profiles of micromachined channels and holes. It was found that the use of LN2 cooling caused brittle erosion in PDMS, allowing it to be micromachined successfully. An erosion rate increase was also observed in PTFE and ABS at high and intermediate impact angles. The use of LN2 also was found to reduce particle embedding.
85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
Issue 11 (November 2008)
Received 3 June 2008, in final form 22 July 2008
Published 26 September 2008
H Getu et al 2008 J. Micromech. Microeng. 18 115010
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