Roger Bodén et al 2008 J. Micromech. Microeng. 18 115009 doi:10.1088/0960-1317/18/11/115009
Roger Bodén, Klas Hjort, Jan-Åke Schweitz and Urban Simu
Show affiliationsThis paper presents one of the strongest mechanical sub-cm3 sized micropumps for microfluidics. It consists of two active valves and one pumping chamber, each operated by a paraffin actuator that is driven by a low-voltage square pulse waveform. The pump is fabricated in a simple process using parylene-coated stainless steel stencils, paraffin and copper clad polyimide. When driving the pump at 0.07 Hz and 2.0 V (0.8 W) per actuator, it pumped water without leakage at a flow rate of 0.75 µL min−1 up to above 50 bar (5 MPa) back-pressure. The frequency dependence was evaluated and a maximum flow rate of 1 µL min−1 at 0.21 Hz and 1.8 V was observed. A thermomechanical FEM analysis, which was in good agreement with experiments at low frequencies, predicts the behaviour at higher frequencies.
85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
47.61.Fg Flows in micro-electromechanical systems (MEMS) and nano-electromechanical systems (NEMS)
Issue 11 (November 2008)
Received 5 June 2008, in final form 20 August 2008
Published 26 September 2008
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John D Barrow et al 2003 Class. Quantum Grav. 20 L155
Manuel Barros et al 2005 Class. Quantum Grav. 22 489
Robert Lambourne 1997 Phys. Educ. 32 34
X Yang et al 2005 Plasma Sources Sci. Technol. 14 314
Adam J. Burgasser 2007 The Astronomical Journal 134 1330