T Kobayashi et al 2008 J. Micromech. Microeng. 18 115007 doi:10.1088/0960-1317/18/11/115007
T Kobayashi, R Maeda and T Itoh
Show affiliationsIn the present study, we propose a new method for the fatigue test of lead zirconate titanate (PZT) thin films for MEMS devices by using self-sensitive piezoelectric microcantilevers developed in our previous study. We have deposited PZT thin films on SOI wafers and fabricated the microcantilevers through the MEMS microfabrication process. In the self-sensitive piezoelectric microcantilevers, the PZT thin films are separated in order to act as an actuator and a sensor. The fatigue characteristic of the PZT thin films can be evaluated by measuring the output voltage of the sensor as a function of time. When a sine wave of 20 Vpp and a dc bias of 10 V were applied to the PZT thin films for an actuator, the output voltage of the sensor fell down after 107 fatigue cycles. We have also investigated the influence of amplitude of the actuation sine wave and dc bias on the fatigue of the PZT thin films by using the proposed fatigue test method.
77.55.+f Dielectric thin films
77.65.-j Piezoelectricity and electromechanical effects
85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
68.60.Bs Mechanical and acoustical properties
81.70.Bt Mechanical testing, impact tests, static and dynamic loads
Condensed matter: electrical, magnetic and optical
Surfaces, interfaces and thin films
Issue 11 (November 2008)
Received 15 May 2008, in final form 21 August 2008
Published 23 September 2008
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