Shigeki Saito and Masaki Sonoda 2008 J. Micromech. Microeng. 18 107001 doi:10.1088/0960-1317/18/10/107001
Shigeki Saito and Masaki Sonoda
Show affiliationsThis note reports on an experimental demonstration of non-impact deposition for electrostatic micromanipulation of a conductive particle by a single probe. The experimental system consists of a probe, a 30-micrometers-in-diameter particle, and a substrate plate. The particle, initially adhering to the probe tip, is detached and deposited onto the substrate by rapid change of the probe–substrate voltage designed on the basis of calculation by a boundary element method. The feasibility is experimentally shown; furthermore, the method of modifying the voltage sequence to improve the rate of success by considering the finite slew rate of the power source is discussed.
A correction was made to this article (in the introduction) on 18 September 2008. The corrected electronic version is identical to the print version.
85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
81.15.-z Methods of deposition of films and coatings; film growth and epitaxy
06.60.Sx Positioning and alignment; manipulating, remote handling
Instrumentation and measurement
Issue 10 (October 2008)
Received 28 June 2008, in final form 16 August 2008
Published 15 September 2008
Shigeki Saito and Masaki Sonoda 2008 J. Micromech. Microeng. 18 107001
R W Johnstone et al 2008 J. Micromech. Microeng. 18 115012
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