Maria Nordström et al 2008 J. Micromech. Microeng. 18 015017 doi:10.1088/0960-1317/18/1/015017
Maria Nordström1, Montserrat Calleja2, Jörg Hübner1 and Anja Boisen1
Show affiliationsWe present a novel bonding technique developed for the fabrication of a cantilever-based biosensing system with integrated optical read-out. The read-out mechanism is based on single-mode waveguides fabricated monolithically in SU-8. For optimal operation of the read-out mode, the cantilever waveguides should be homogenous and this bonding technique ensures free-hanging cantilevers that are surrounded by the same material for bottom and top claddings. The bonding step is necessary because SU-8 is a negative resist where free-hanging structures cannot be fabricated directly. This paper gives details on the processing aspects and the parameters of the fabrication steps.
87.80.-y Biophysical techniques (research methods)
42.70.Jk Polymers and organics
42.82.Et Waveguides, couplers, and arrays
42.82.Cr Fabrication techniques; lithography, pattern transfer
Soft matter, liquids and polymers
Instrumentation and measurement
Issue 1 (January 2008)
Received 23 May 2007, in final form 22 October 2007
Published 3 December 2007
Maria Nordström et al 2008 J. Micromech. Microeng. 18 015017
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