Jui-che Tsai et al 2008 J. Micromech. Microeng. 18 015015 doi:10.1088/0960-1317/18/1/015015
Linearization of a two-axis MEMS scanner driven by vertical comb-drive actuators
Jui-che Tsai1, Li-Cheng Lu1, Wei-Chi Hsu1, Chia-Wei Sun2 and Ming C Wu3
Show affiliationsA driving scheme using a pair of differential voltages (Vx, Vy) over a bias voltage is proposed to linearize the dc characteristic (angle versus voltage) of a two-axis MEMS scanner. The micromirror has a gimbal-less structure and is driven by vertical comb-drive actuators in conjunction with a leverage mechanism. At an optimal bias voltage of 53 V, a linear optical scan range of ±3.2° is achieved experimentally in both the x and y directions with the differential voltages ranging from −10 V to + 10 V.
- PACS
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85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
- Subjects
- Dates
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Issue 1 (January 2008)
Received 2 August 2007, in final form 24 October 2007
Published 3 December 2007
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Linearization of a two-axis MEMS scanner driven by vertical comb-drive actuators
Jui-che Tsai et al 2008 J. Micromech. Microeng. 18 015015
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