Yuli Wang et al 2007 J. Micromech. Microeng. 17 1371 doi:10.1088/0960-1317/17/7/020
Yuli Wang1,2, Jeng-Hao Pai3, Hsuan-Hong Lai3, Christopher E Sims1, Mark Bachman2,4, G P Li2,4 and Nancy L Allbritton1,2,3
Show affiliationsThere is currently increasing interest in using SU-8 photoresist to build microstructures for micro-electro-mechanical systems (MEMS). This report describes an effective bench-top method to modify the surface properties of SU-8 photoresist. This strategy relies on the residual epoxide groups present on the surface of SU-8 following fabrication. These epoxide groups are converted into hydroxyl groups by oxidation with a high concentration of cerium(IV) ammonium nitrate (CAN) and nitric acid. Subsequently the surface hydroxyl groups are used as initiation sites for graft polymerization catalyzed by CAN in the presence of acid. A number of water-soluble polymers including poly(acrylic acid), poly(acrylamide), poly(ethylene glycol) were successfully grafted onto SU-8. The presence of surface-linked polymers was confirmed by contact angle measurements, attenuated total reflection-Fourier transform infrared spectroscopy and toluidine blue adsorption. This method was particularly useful for tailoring the surface properties of complex or enclosed microstructures, for example, microfluidic channels. In addition the grafted polymers could serve as sites for high density protein immobilization or cell attachment on Bio-MEMS.
87.80.-y Biophysical techniques (research methods)
78.30.Jw Organic compounds, polymers
82.35.Pq Biopolymers, biopolymerization
82.35.Jk Copolymers, phase transitions, structure
85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
Soft matter, liquids and polymers
Condensed matter: electrical, magnetic and optical
Instrumentation and measurement
Issue 7 (July 2007)
Received 20 March 2007, in final form 18 May 2007
Published 14 June 2007
Yuli Wang et al 2007 J. Micromech. Microeng. 17 1371
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