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Surface graft polymerization of SU-8 for bio-MEMS applications

Yuli Wang1,2, Jeng-Hao Pai3, Hsuan-Hong Lai3, Christopher E Sims1, Mark Bachman2,4, G P Li2,4 and Nancy L Allbritton1,2,3

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There is currently increasing interest in using SU-8 photoresist to build microstructures for micro-electro-mechanical systems (MEMS). This report describes an effective bench-top method to modify the surface properties of SU-8 photoresist. This strategy relies on the residual epoxide groups present on the surface of SU-8 following fabrication. These epoxide groups are converted into hydroxyl groups by oxidation with a high concentration of cerium(IV) ammonium nitrate (CAN) and nitric acid. Subsequently the surface hydroxyl groups are used as initiation sites for graft polymerization catalyzed by CAN in the presence of acid. A number of water-soluble polymers including poly(acrylic acid), poly(acrylamide), poly(ethylene glycol) were successfully grafted onto SU-8. The presence of surface-linked polymers was confirmed by contact angle measurements, attenuated total reflection-Fourier transform infrared spectroscopy and toluidine blue adsorption. This method was particularly useful for tailoring the surface properties of complex or enclosed microstructures, for example, microfluidic channels. In addition the grafted polymers could serve as sites for high density protein immobilization or cell attachment on Bio-MEMS.


PACS

87.80.-y Biophysical techniques (research methods)

78.30.Jw Organic compounds, polymers

82.35.Pq Biopolymers, biopolymerization

82.35.Jk Copolymers, phase transitions, structure

85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices

Subjects

Soft matter, liquids and polymers

Electronics and devices

Condensed matter: electrical, magnetic and optical

Instrumentation and measurement

Medical physics

Biological physics

Nanoscale science and low-D systems

Chemical physics and physical chemistry

Dates

Issue 7 (July 2007)

Received 20 March 2007, in final form 18 May 2007

Published 14 June 2007



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