Mohammad I Younis et al 2007 J. Micromech. Microeng. 17 1360 doi:10.1088/0960-1317/17/7/019
Mohammad I Younis, Fadi M Alsaleem, Ronald Miles and Quang Su
Show affiliationsThis paper presents experimental and theoretical investigation of a new concept of switches (triggers) that are actuated at or beyond a specific level of mechanical shock or acceleration. The principle of operation of the switches is based on dynamic pull-in instability induced by the combined interaction between electrostatic and mechanical shock forces. These switches can be tuned to be activated at various shock and acceleration thresholds by adjusting the dc voltage bias. Two commercial off-the-shelf capacitive accelerometers operating in air are tested under mechanical shock and electrostatic loading. A single-degree-of-freedom model accounting for squeeze-film damping, electrostatic forces and mechanical shock is utilized for the theoretical investigation. Good agreement is found between simulation results and experimental data. Our results indicate that designing these new switches to respond quasi-statically to mechanical shock makes them robust against variations in shock shape and duration. More importantly, quasi-static operation makes the switches insensitive to variations in damping conditions. This is promising for lowering the cost of packaging for these switches since they can operate in atmospheric pressure with no hermetic sealing or costly packaging required.
Issue 7 (July 2007)
Received 13 March 2007, in final form 15 May 2007
Published 11 June 2007
Mohammad I Younis et al 2007 J. Micromech. Microeng. 17 1360
José F Cariñena and Héctor Figueroa 1997 J. Phys. A: Math. Gen. 30 2705
M Salluzzi et al 2006 Phys. Med. Biol. 51 407
Benjamin Lange 2001 Class. Quantum Grav. 18 4153
Cheng-Ying Chou et al 2007 Phys. Med. Biol. 52 1923
Alexander Sakhnovich 2006 Inverse Problems 22 2083
D V Ahluwalia-Khalilova 2005 Class. Quantum Grav. 22 1433
P. Español and P. Warren 1995 Europhys. Lett. 30 191
Luo Shao-kai et al 2001 Chinese Phys. 10 271
M D Karunanayake et al 2007 Meas. Sci. Technol. 18 1908