A new, environmentally friendly, inexpensive and non-destructive method for removing SU-8 after being an electroplating mold in microfluidic fabrication is demonstrated in this paper. A controllable thermal delaminating method assisted by an efficient high-speed aerosol jet consisting of two major steps, delamination followed by removal by lifting, is presented. Experiments with the thermal process, operated at a rising temperature ΔT of 340 °C for 30 min, were carried out. Four delaminations were observed and the critical buckling stresses were calculated to be 38.98, 35.24, 42.04 and 41.26 MPa, respectively. The results show that these delaminations occurred at a rising temperature ΔT of 290, 260.5, 314.7 and 308.5 °C, respectively. The morphology of the thermal buckling-driven delamination was edge initiated and straight sided. The effects of the carbon dioxide (CO₂) snow jet at a distance of 10 mm from the nozzle exit as well as the lift force F_dp, drag force F_d and impact force F_i were determined to be 79 × 10⁻³ N, 0.625 × 10⁻³ N and (1.65–4.95) × 10⁻³ N, respectively. Based on the analysis of the lift, drag and impact forces, the lifting force dominates the effects of the CO₂ snow jet and is tens of times larger than the others. The experiments and analyses showed that the best distance for the CO₂ snow jet to the nozzle exit was 6–10 mm.