Changju Wu et al 2007 J. Micromech. Microeng. 17 2393 doi:10.1088/0960-1317/17/12/001
Changju Wu, Zhonghe Jin, HuiQuan Wang, Huilian Ma and Yuelin Wang
Show affiliationsBased on the law that the oxidation rate of Si decreases with the oxidation time, a method to fabricate a nanochannel is presented. In this method, the depth of the channel is precisely controlled by the oxidation time. Nanochannels are fabricated with depths of several tens of nanometers, width of 20 µm and lengths of several millimeters. SEM images show that the channel is fabricated well. It is shown that the flow rate increases linearly with the inlet pressure for water, NaCl solution and oil. Besides, the flow rate increases with the temperature. The capillary phenomenon is also observed in the nanochannel.
47.60.-i Flow phenomena in quasi-one-dimensional systems
47.55.nb Capillary and thermocapillary flows
47.61.Fg Flows in micro-electromechanical systems (MEMS) and nano-electromechanical systems (NEMS)
Issue 12 (December 2007)
Received 26 June 2007, in final form 21 August 2007
Published 25 October 2007
Changju Wu et al 2007 J. Micromech. Microeng. 17 2393
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