I Fazal and M C Elwenspoek 2007 J. Micromech. Microeng. 17 2366 doi:10.1088/0960-1317/17/11/026
I Fazal and M C Elwenspoek
Show affiliationsA normally open piezoelectric actuated microvalve which modulates a gas flow is fabricated and tested. This work is based on the novel concept of combining micro-machining- and fine machining. The microvalve was tested for air flow. It is shown that a flow rate of 250 ml min−1 for a pressure difference of 4 bars can be achieved. The continuous and controlled flow of gas at any stage of valve operation can be obtained. Additionally, it has been shown that almost no hysteresis occurs during the valve operation and the power consumption is very low.
47.40.-x Compressible flows; shock and detonation phenomena
47.60.-i Flow phenomena in quasi-one-dimensional systems
Issue 11 (November 2007)
Received 27 May 2007, in final form 21 September 2007
Published 17 October 2007
I Fazal and M C Elwenspoek 2007 J. Micromech. Microeng. 17 2366
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