N B Sopher 1,2, Z R Abrams 1,2, M Reches 3, E Gazit 2,3 and Y Hanein 1,2
1
Department of Physical Electronics, School of Electrical Engineering, The Iby and Aladar Fleischman Faculty of Engineering, Tel-Aviv University, Tel-Aviv 69978, Israel
2
The Center for Nanoscience and Nanotechnology, Tel Aviv University, Tel-Aviv 69978, Israel
3
Department of Molecular Microbiology and Biotechnology, George S Wise Faculty of Life Sciences, Tel-Aviv University, Tel-Aviv 69978, Israel
Journal of Micromechanics and Microengineering Create an alert RSS this journal
N B Sopher et al 2007 J. Micromech. Microeng. 17 2360
Self-assembled peptide nanotubes are unique, newly developed nano-structures which exhibit many exciting properties that may establish them as preferred nano-technological building blocks, especially for nano-fluidics, biological sensing and self-assembly applications. Integrating peptide nanotube materials in standard micro-fabrication processes is inhibited by some of their specific characteristics, which make them susceptible to some of the chemicals used in standard lithography. Here, we present an adjusted photo-lithography compatible scheme that allows the integration of these novel new nano-materials in batch processing techniques. Specifically, a scheme for creating nano-fluidic channels using peptide nanotubes, as well as contacting nanotubes to electrodes, is demonstrated. In addition, some of the incompatible fabrication methods are delineated. The modified micro-fabrication processes described here can be extended to other types of sensitive nano-materials.
87.85.Qr Nanotechnologies-design
85.40.Hp Lithography, masks and pattern transfer
Issue 11 ( 1 November 2007)
Received 7 May 2007
,
in final form 2 September 2007
Published 17 October 2007
N B Sopher et al 2007 J. Micromech. Microeng. 17 2360
P Gomez et al 2007 J. Phys. D: Appl. Phys. 40 4396
D M Xiao et al 2000 J. Phys. D: Appl. Phys. 33 L145
O Hemmers et al 1995 J. Phys. B: At. Mol. Opt. Phys. 28 L693
K Tennakone and W G D Dharmaratna 1983 J. Phys. D: Appl. Phys. 16 855
S D Penn et al 2003 Class. Quantum Grav. 20 2917
P Graneau 1989 J. Phys. D: Appl. Phys. 22 1083
J Weiszburg 1966 Br. J. Appl. Phys. 17 693
Y Ozeki 1995 J. Phys. A: Math. Gen. 28 3645
L Vitushkin et al 2002 Metrologia 39 407