N B Sopher et al 2007 J. Micromech. Microeng. 17 2360 doi:10.1088/0960-1317/17/11/025
N B Sopher1,2, Z R Abrams1,2, M Reches3, E Gazit2,3 and Y Hanein1,2
Show affiliationsSelf-assembled peptide nanotubes are unique, newly developed nano-structures which exhibit many exciting properties that may establish them as preferred nano-technological building blocks, especially for nano-fluidics, biological sensing and self-assembly applications. Integrating peptide nanotube materials in standard micro-fabrication processes is inhibited by some of their specific characteristics, which make them susceptible to some of the chemicals used in standard lithography. Here, we present an adjusted photo-lithography compatible scheme that allows the integration of these novel new nano-materials in batch processing techniques. Specifically, a scheme for creating nano-fluidic channels using peptide nanotubes, as well as contacting nanotubes to electrodes, is demonstrated. In addition, some of the incompatible fabrication methods are delineated. The modified micro-fabrication processes described here can be extended to other types of sensitive nano-materials.
87.85.Qr Nanotechnologies-design
85.40.Hp Lithography, masks and pattern transfer
Issue 11 (November 2007)
Received 7 May 2007, in final form 2 September 2007
Published 17 October 2007
N B Sopher et al 2007 J. Micromech. Microeng. 17 2360
P Gomez et al 2007 J. Phys. D: Appl. Phys. 40 4396
C J Olson Reichhardt and C Reichhardt 2003 J. Phys. A: Math. Gen. 36 5841
P C W Davies 2004 Class. Quantum Grav. 21 2761
M Ondrejcek et al 2005 J. Phys.: Condens. Matter 17 S1397
John B Boffard et al 2004 J. Phys. D: Appl. Phys. 37 R143
T Vestad et al 2004 J. Micromech. Microeng. 14 1503
A Jaroń-Becker et al 2003 J. Phys. B: At. Mol. Opt. Phys. 36 L375
T Bartsch et al 1999 J. Phys. A: Math. Gen. 32 3013
P Ajith et al 2006 Class. Quantum Grav. 23 5825